关键词: 三叠片, 加速度传感器, 结构优化, 矢量水听器

Abstract:

The sensitivity equation of the bimorph type piezoelectric acceleration sensor was derived from the piezoelectric constitutive equation and the bending formula of cantilever, the finite element method was also used to build the model of the sensor. A method of improving the performance of the acceleration sensor by fabricating hollow structure on surfaces of the metal beam part was analyzed by using finite element method. A vector hydrophone by using bimorph type acceleration sensors was designed, modeled and tested.

Key words: bimorph, acceleration sensor, structure optimization, vector hydrophone